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TU Dresden » Faculty of Mechanical Science and Engineering » Institute for Materials Science » Chair of Materials Science and Nanotechnology
molecular computing equipment; Exposure of 4" wafer with 320 nm wavelength light; 4 vacuum concat cards; Mask monitoring on TFT-Display : Maskaligner
» equipment   » Exposure of 4" wafer with 320 nm wavelength light; 4 vacuum concat cards; Mask monitoring on TFT-Display Suss Microtec – Maskaligner MJB4


Suss Microtec – Maskaligner MJB4

( Exposure of 4" wafer with 320 nm wavelength light; 4 vacuum concat cards; Mask monitoring on TFT-Display )




name:Maskaligner
date:2005
type:Exposure of 4" wafer with 320 nm wavelength light; 4 vacuum concat cards; Mask monitoring on TFT-Display ,
responsible:
location:MBZ
producer:Suss Microtec
brand name:Maskaligner MJB4
more infos:data sheet



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last modified: 2020.10.28 Wed
author: webadmin