Microfluidic alignment and trapping of 1D nanostructures - a simple fabrication route for single-nanowire field effect transistors
A. Gang, N. Haustein, L. Baraban, W. Weber, T. Mikolajick, J. Thiele, and G. Cuniberti
RSC Advances 5, 94702 (2015)
We present a simple method to microfluidically align and trap 1D nanostructures from suspension at well-defined positions on a receiver substrate for the fabrication of single-nanowire field effect transistors (NW FETs). Our approach allows for subsequent contacting of deposited NWs via standard UV-lithography. We demonstrate that silicon as well as copper(II) oxide NWs can be processed, and that up to 13 out of 32 designated trapping sites are occupied with single-NW FETs.