Scanning Electron Microscope (SEM)


General info

Facility:Chair of Materials Science and Nanotechnology
Partner:TU Dresden
Location:HAL 012

Technical specs

Specifications:

ResolutionHV mode 3.0 nm(30 kV)、8 nm(3 kV)、15 nm(1 kV)
LV mode *1 4.0 nm(30 kV)
Magnification × 5 to × 300,000 (on 128 mm × 96 mm image siza)
Preset magnifications 5 step, user selectable
Standard recipe Built in
Custom recipe Operation conditions (Optics, Image mode, LV pressure*1) Specimen stage
Image mode Secondary electron image, REF image, Composition*1, Topography*1, Shadowed*1
Accelerating voltage 0.5 kV to 30 kV
Filament Factory pre-centered filament
Electron gun Fully automated, manual override
Condenser lens Zoom condenser lens
Objective lens Super conical objective lens
Objective lens apertures 3 stages, XY fine adjustable
Stigmator memory Built in
Electrical image shift ± 50 μm (WD = 10 mm)
Auto functions Focus, brightness, contrast, stigmator
Specimen stage Eucentric large-specimen stage
X: 80 mm, Y: 40 mm, Z: 5 mm to 48 mm,
Tilt: −10° to 90°, Rotation: 360°
Reference image (Navigator*3) 4 images
Specimen exchange Draw out the stage
Maximum specimen 150 mm diameter
PC IBM PC/AT compatible
OS Windows 7
Monitor 19 inch LCD, 1 or 2*2
Frame store 640 × 480, 1,280 × 960, 2,560 × 1,920, 5,120 × 3,340
Dual live image Built in
Full size image display Built in
Pseudo color Built in
Multi image display 2 images, 4 images
Digital zoom Built in
Dual magniἀcation Built in
Network Ethernet
Measurement Built in
Image format BMP、TIFF、JPEG
Auto image archiving Built in
Pumping system Fully automated, DP: 1, RP: 1 or 2*1
Switching vacuum mode*1 Through the menu, less than 1 minute
LV Pressure*1 10 to 270 Pa
JED-2300 EDS*2 Built in

Scanning Electron Microscope (SEM)


General info

Facility:Chair of Materials Science and Nanotechnology
Partner:TU Dresden
Location:HAL 012

Technical specs

Specifications:

ResolutionHV mode 3.0 nm(30 kV)、8 nm(3 kV)、15 nm(1 kV)
LV mode *1 4.0 nm(30 kV)
Magnification × 5 to × 300,000 (on 128 mm × 96 mm image siza)
Preset magnifications 5 step, user selectable
Standard recipe Built in
Custom recipe Operation conditions (Optics, Image mode, LV pressure*1) Specimen stage
Image mode Secondary electron image, REF image, Composition*1, Topography*1, Shadowed*1
Accelerating voltage 0.5 kV to 30 kV
Filament Factory pre-centered filament
Electron gun Fully automated, manual override
Condenser lens Zoom condenser lens
Objective lens Super conical objective lens
Objective lens apertures 3 stages, XY fine adjustable
Stigmator memory Built in
Electrical image shift ± 50 μm (WD = 10 mm)
Auto functions Focus, brightness, contrast, stigmator
Specimen stage Eucentric large-specimen stage
X: 80 mm, Y: 40 mm, Z: 5 mm to 48 mm,
Tilt: −10° to 90°, Rotation: 360°
Reference image (Navigator*3) 4 images
Specimen exchange Draw out the stage
Maximum specimen 150 mm diameter
PC IBM PC/AT compatible
OS Windows 7
Monitor 19 inch LCD, 1 or 2*2
Frame store 640 × 480, 1,280 × 960, 2,560 × 1,920, 5,120 × 3,340
Dual live image Built in
Full size image display Built in
Pseudo color Built in
Multi image display 2 images, 4 images
Digital zoom Built in
Dual magniἀcation Built in
Network Ethernet
Measurement Built in
Image format BMP、TIFF、JPEG
Auto image archiving Built in
Pumping system Fully automated, DP: 1, RP: 1 or 2*1
Switching vacuum mode*1 Through the menu, less than 1 minute
LV Pressure*1 10 to 270 Pa
JED-2300 EDS*2 Built in