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Atomic resolution studies of materials and interfaces: Transmission electron microscopy

DGM workshop "Nano-scale Materials and Advanced Characterization Techniques" | event contribution
Dec. 5, 2012 | Dresden (Fraunhofer IZFP)

- Elemental analysis: EDX and EELS/EFTEM
- Electron tomography

Authors
Gluch
Jürgen Gluch
former Senior scientist
now Employee at Robert Bosch Semiconductor Manufacturing
Gluch
Jürgen Gluch
former Senior scientist
now Employee
Gluch
Jürgen Gluch
former Senior scientist
now Employee

Atomic resolution studies of materials and interfaces: Transmission electron microscopy

DGM workshop "Nano-scale Materials and Advanced Characterization Techniques" | event contribution
Dec. 5, 2012 | Dresden (Fraunhofer IZFP)

- Elemental analysis: EDX and EELS/EFTEM
- Electron tomography

Authors
Gluch
Jürgen Gluch
former Senior scientist
now Employee at Robert Bosch Semiconductor Manufacturing
Gluch
Jürgen Gluch
former Senior scientist
now Employee
Gluch
Jürgen Gluch
former Senior scientist
now Employee