ResearchGateFabrication and characterization of n-type Ge1−xSnx- and Si1–x–yGeySnx-on-SOI junctionless transistors
Scientific Reports 15, 44659 (2025).
O. Steuer, S. Ghosh, D. Schwarz, M. Oehme, S. Lehmann, R. Hübner, C. Fowley, A. Erbe, S. Zhou, M. Helm, G. Cuniberti, S. Prucnal, and Y. M. Georgiev.
Journal DOI: https://doi.org/10.1038/s41598-025-31272-y

Ge1−xSnx and Si1−x−yGeySnx alloys are promising materials for future nanoelectronic applications owing to their high carrier mobilities and CMOS compatibility. However, ternary Si1−x−yGeySnx transistors have only theoretically been discussed, and there are only a few reports on lateral n-type Ge1−xSnx transistors to benchmark their material performance. The low equilibrium solid solubility of Sn in Si1−xGex (less than 1 at%) requires device fabrication processes at temperatures below the growth temperature of Si1−x−yGeySnx (x > equilibrium solubility) or at non-equilibrium conditions. Therefore, Si-based processes need to be adjusted according to the materials requirements. A relatively easy-to-fabricate device concept are junctionless field effect transistors, which operate as a gated resistor. In this work, we use Ge0.94Sn0.06 and Si0.14Ge0.80Sn0.06 grown on silicon-on-insulator substrates to fabricate and characterize lateral n-type Ge1−xSnx and SiyGe1−x−ySnx junctionless field effect transistors. The transistors were structurally characterized by top-view scanning electron microscopy and cross-sectional transmission electron microscopy. Electrical characterizations by transfer characteristics show the first working n-type Ge1−xSnx and Si1−x−yGeySnx hetero-nanowire transistors, achieving on/off-current ratios of up to eight orders of magnitude.

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ResearchGateFabrication and characterization of n-type Ge1−xSnx- and Si1–x–yGeySnx-on-SOI junctionless transistors
Scientific Reports 15, 44659 (2025).
O. Steuer, S. Ghosh, D. Schwarz, M. Oehme, S. Lehmann, R. Hübner, C. Fowley, A. Erbe, S. Zhou, M. Helm, G. Cuniberti, S. Prucnal, and Y. M. Georgiev.
Journal DOI: https://doi.org/10.1038/s41598-025-31272-y

Ge1−xSnx and Si1−x−yGeySnx alloys are promising materials for future nanoelectronic applications owing to their high carrier mobilities and CMOS compatibility. However, ternary Si1−x−yGeySnx transistors have only theoretically been discussed, and there are only a few reports on lateral n-type Ge1−xSnx transistors to benchmark their material performance. The low equilibrium solid solubility of Sn in Si1−xGex (less than 1 at%) requires device fabrication processes at temperatures below the growth temperature of Si1−x−yGeySnx (x > equilibrium solubility) or at non-equilibrium conditions. Therefore, Si-based processes need to be adjusted according to the materials requirements. A relatively easy-to-fabricate device concept are junctionless field effect transistors, which operate as a gated resistor. In this work, we use Ge0.94Sn0.06 and Si0.14Ge0.80Sn0.06 grown on silicon-on-insulator substrates to fabricate and characterize lateral n-type Ge1−xSnx and SiyGe1−x−ySnx junctionless field effect transistors. The transistors were structurally characterized by top-view scanning electron microscopy and cross-sectional transmission electron microscopy. Electrical characterizations by transfer characteristics show the first working n-type Ge1−xSnx and Si1−x−yGeySnx hetero-nanowire transistors, achieving on/off-current ratios of up to eight orders of magnitude.

Cover
©https://doi.org/10.1038/s41598-025-31272-y
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