Optical and electron beam lithography allow precise patterning on the micro-nanoscale; these paradigms are routinely utilized to construct a variety of electronic, optical and biomedical devices in two (and quasi-three) dimensions. In this talk, I will describe strategies that utilize lithographic multilayer patterning to construct 2D structures that self-assemble and show chemically-responsive functionality. Specifically, I will describe the construction of 3D patterned polyhedral structures with sizes ranging from the nanoscale to the millimeter scale; and give examples of their utilization in electronics, optics and biomedical engineering. I will also describe strategies to reconfigure these structures when exposed to specific chemicals toward the construction of autonomous and Micro Chemo-Mechanical Systems (MCMS). I will discuss lithographically patterned and chemically responsive microgrippers. As opposed to electrical or pneumatic signals typically used to actuate conventional microtools; these grippers close and open in when exposed to specific chemicals such as proteases, which are disease markers (without the need for any batteries, tethers or wiring). The grippers were utilized to pick-and-place objects and to enable an in vitro surgical biopsy towards the ultimate goal of creating an autonomous micro surgeon.