| Manufacturer: | Heidelberg Instruments |
| Model: | DWL 66 |
| Facility: | Chair of Materials Science and Nanotechnology | Partner: | TU Dresden |
| Location: | MBZ 414 |
The DWL 66+ laser lithography tool is a high-resolution direct-write pattern generator. As an allrounder, the DWL 66+ is ideal for research and development (R&D) in microelectronics, MEMS, microfluidics, sensors, non-standard substrates, advanced packaging — virtually any academic application that requires microstructure fabrication. The DWL 66+ stands out with its Grayscale Exposure Mode which creates complex 2.5D microstructures such as micro-optics for mobile applications, diffraction optical elements (DOE), computer-generated holograms, and structured surfaces.
| Manufacturer: | Heidelberg Instruments |
| Model: | DWL 66 |
| Facility: | Chair of Materials Science and Nanotechnology | Partner: | TU Dresden |
| Location: | MBZ 414 |
The DWL 66+ laser lithography tool is a high-resolution direct-write pattern generator. As an allrounder, the DWL 66+ is ideal for research and development (R&D) in microelectronics, MEMS, microfluidics, sensors, non-standard substrates, advanced packaging — virtually any academic application that requires microstructure fabrication. The DWL 66+ stands out with its Grayscale Exposure Mode which creates complex 2.5D microstructures such as micro-optics for mobile applications, diffraction optical elements (DOE), computer-generated holograms, and structured surfaces.
