| Manufacturer: | Stangl Semiconductor Equipment AG |
| Facility: | Chair of Materials Science and Nanotechnology | Partner: | TU Dresden |
| Location: | MBZ 414 |
4 Lab workstations with wafer cleaning facilities; Cleaning, etching, Ultrasonic annealing, spin coating on Si and glass wafers.
| Manufacturer: | Stangl Semiconductor Equipment AG |
| Facility: | Chair of Materials Science and Nanotechnology | Partner: | TU Dresden |
| Location: | MBZ 414 |
4 Lab workstations with wafer cleaning facilities; Cleaning, etching, Ultrasonic annealing, spin coating on Si and glass wafers.
