UV Lithography System


General info

Manufacturer:Suss MicroTec
Model:Maskaligner MJB4
Facility:Chair of Materials Science and Nanotechnology
Partner:TU Dresden
Location:MBZ 414

Description

Easy to use and compact in size the SUSS MicroTec MJB4 represents the perfect system for laboratories and small volume production. As an inexpensive photolithography solution the MJB4 has set industry standards specifically for processing of small substrates and pieces up to 100 mm. Equipped with a reliable, high precision mask alignment and high resolution printing capability in the submicron range the MJB4 demonstrates a performance unsurpassed by any comparable machine.

UV Lithography System


General info

Manufacturer:Suss MicroTec
Model:Maskaligner MJB4
Facility:Chair of Materials Science and Nanotechnology
Partner:TU Dresden
Location:MBZ 414

Description

Easy to use and compact in size the SUSS MicroTec MJB4 represents the perfect system for laboratories and small volume production. As an inexpensive photolithography solution the MJB4 has set industry standards specifically for processing of small substrates and pieces up to 100 mm. Equipped with a reliable, high precision mask alignment and high resolution printing capability in the submicron range the MJB4 demonstrates a performance unsurpassed by any comparable machine.